| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5354961 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠Compact, homogeneous, crack-free β-SiC thin films were pulsed laser deposited. ⺠The films were characterised by SEM, TEM, FTIR, m-Raman spectroscopy. ⺠The films were directly irradiated with ns laser pulses and their morphology and nano-structure were investigated by FTIR, SEM, EDX, TEM, m-Raman. ⺠The films were irradiated by a plasma produced by irradiation with fs laser pulses a low-density polyethylene (LDPE) foil placed in front of the β-SiC. ⺠The indirect irradiation results in a laser-induced periodic surface structure on β-SiC. ⺠β-SiC shows meaningful chemical and structural stability in highly energetic, aggressive plasma ambient.
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Authors
L. Gemini, D. Margarone, T. Mocek, F. Neri, S. Trusso, P.M. Ossi,