Laser generated Ge ions accelerated by additional electrostatic field for implantation technology

► Electrostatic acceleration and deflection can enhance the quality of laser ion implantation. ► Performance of the electrostatic acceleration and deflection set-up was simulated and optimized with the Opera 3D code. ► The optimized system was tested in experiments with the ion time of flight ion measurements. ► Ion time of flight measurements confirmed the improvements due to the application of the electrostatic system. ► Results of the material research methods confirmed he improvements due to the application of the electrostatic system.