| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355057 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠We studied the structural and electrical properties of AZO films with different film thickness. ⺠Grain size increases and stress decreases with thickness increase, leading to enhanced crystallinity. ⺠Grain size dependence of stress follows the same tendency for all samples regardless of deposition temperature. ⺠Defects at grain boundary are reduced with increase of film thickness or deposition temperature. ⺠The mobility increase is accompanied by grain size increase and compressive stress reduction.
Related Topics
Physical Sciences and Engineering
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Authors
Kang Hyon Ri, Yunbo Wang, Wen Li Zhou, Jun Xiong Gao, Xiao Jing Wang, Jun Yu,