Three dimensional imaging using secondary ion mass spectrometry and atomic force microscopy

Article ID	Journal	Published Year	Pages	File Type
5355063	Applied Surface Science	2011	6 Pages	PDF

Abstract

âº We present a method for correcting the 3D secondary ion distribution using AFM. âº We compare traditional SIMS 3D imaging with AFM corrected SIMS 3D imaging. âº AFM-SIMS permits a more accurate determination of the sputter rate. âº AFM-SIMS allows the accurate localization secondary ion signal hotspots. âº AFM scanning of the sputter zone allows accurate determination of the ion fluence.

Keywords

3D imaging secondary ion mass spectrometry Ion fluence atomic force microscopy

Related Topics

Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

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Three dimensional imaging using secondary ion mass spectrometry and atomic force microscopy

Authors

Yves Fleming, Tom Wirtz, Urs Gysin, Thilo Glatzel, Urs Wegmann, Ernst Meyer, Urs Maier, Jörg Rychen,