Article ID Journal Published Year Pages File Type
5355175 Applied Surface Science 2015 5 Pages PDF
Abstract
The influence of annealing temperature, As4 beam equivalent pressure and multi-runs growth on AlGaAs/GaAs structures was investigated. The real space ultrahigh vacuum scanning tunneling microscopy images showed that AlGaAs/GaAs surface morphology greatly depends on annealing conditions and initial state of surface. The reasons of the surface phenomenon are proposed, and a physical model was proposed to explain why the multi-runs growth structures can increase AlGaAs surface roughness. The reasonable preparation conditions for AlGaAs/GaAs structures were proposed.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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