| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355286 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠Al-doped ZnO thin film. ⺠Modified pulse sequence atomic layer deposition. ⺠Most effective pulse sequence of Al-doped ZnO thin films is DEZ/N2/TMA/N2/H2O/N2. ⺠6.5 dB of EMI-SE with 131 nm thick Al-doped ZnO thin film.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yong-June Choi, Su Cheol Gong, David C. Johnson, Stephen Golledge, Geun Young Yeom, Hyung-Ho Park,