Article ID Journal Published Year Pages File Type
5355292 Applied Surface Science 2013 5 Pages PDF
Abstract
► We study the effect of oxygen pressure on ion dynamics and films microstructure. ► The ambient oxygen affects the ion dynamics when exceeding a threshold pressure. ► Three ionic components were observed in a certain range of oxygen pressure. ► Clusters formation and deposition were discussed. ► A correlation between the ion dynamics and the films microstructure was obtained.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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