Article ID Journal Published Year Pages File Type
5355418 Applied Surface Science 2011 5 Pages PDF
Abstract
► Wafer-level nanostructures were fabricated atop double-side sapphire substrates. ► The fabrication method was used natural lithography and dry-etching method. ► The optical characterization of nanostructures exhibits a high transmittance. ► Increasing transmittance was over broadband spectra with wide incident angles.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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