Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5355418 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠Wafer-level nanostructures were fabricated atop double-side sapphire substrates. ⺠The fabrication method was used natural lithography and dry-etching method. ⺠The optical characterization of nanostructures exhibits a high transmittance. ⺠Increasing transmittance was over broadband spectra with wide incident angles.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yu-Sheng Lin, Wen-Ching Hsu, Kuo-Cheng Huang, J. Andrew Yeh,