Article ID Journal Published Year Pages File Type
5355461 Applied Surface Science 2011 5 Pages PDF
Abstract
► We applied Parrat's recursive model for constructing theoretical X-ray reflectivity of ZnO thin film. ► Independent information was exploited from Fourier transform of Fresnel reflectivity normalized experimental X-ray reflectivity. ► Optimization was established by constructing the error function describes discrepancy between reflectivities. ► Genetic algorithm optimization yielded structural parameters such as thickness, roughness and EDP of the film.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
ZnO thin film characterization by X-ray reflectivity optimization using genetic algorithm and Fourier transformation
Authors
, , ,