Article ID Journal Published Year Pages File Type
5355476 Applied Surface Science 2011 5 Pages PDF
Abstract
► Boron phosphide films with cubic phase are obtained using radio frequency reactive magnetron sputtering technique at low temperature. ► The variation laws of microstructure and mechanical properties with the gas flow ratio increasing by RFRMS technique have been investigated. ► The results indicate that the BP film prepared at low gas flow ratio of 3/50 is optimal.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effect of gas flow ratio on the microstructure and mechanical properties of boron phosphide films prepared by reactive magnetron sputtering
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