Article ID Journal Published Year Pages File Type
5355478 Applied Surface Science 2011 7 Pages PDF
Abstract
► Ti-Cu-N nanocomposite films were deposited by pulse biased arc ion plating. ► The Cu content depended on the pulse bias voltage. ► The maximum value of hardness reaches 31.5 GPa at −600 V, with Cu content of 1.75 at.%. ► The maximum value of adhesion of the film with 74 N was obtained at pulse bias −900 V.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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