| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355483 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠The N2 flow influences the structure and properties of (TiVCrZrHf)N coatings. ⺠The saturated nitride coatings reveal a columnar structure with FCC crystal phase. ⺠The coatings without external heating or bias can achieve a high hardness of 23.8 GPa.
Keywords
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Shih-Chang Liang, Du-Cheng Tsai, Zue-Chin Chang, Huan-Shin Sung, Yi-Chen Lin, Yi-Jung Yeh, Min-Jen Deng, Fuh-Sheng Shieu,