Lithium titanium oxynitride thin film with enhanced lithium storage and rate capability

- LTON thin films are deposited by RF magnetron sputtering with powder target.
- The substitution of nitrogen for oxygen can make more abundant cross-linking structures and favor the higher mobility of lithium ions.
- The LTON had a high capacity of 290 mAh g−1 at 0.1C, excellent rate capability of 160 mAh g−1 at 5C and only ≈7% capacity loss after 100 cycles at 5C charge and discharge rate.