Article ID Journal Published Year Pages File Type
5355598 Applied Surface Science 2016 7 Pages PDF
Abstract

- Residual strain relaxation in nano crystalline platinum films was investigated.
- Magnetron sputtered and ion beam sputtered Pt films are compared.
- XRD measurements were carried out using synchrotron radiation.
- Thickness fringes in the Bragg peak give information on microstructure.
- Residual strain relaxation is stronger in films composed of equally oriented columns.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Microstructure and strain relaxation in thin nanocrystalline platinum films produced via different sputtering techniques
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