Article ID Journal Published Year Pages File Type
5355625 Applied Surface Science 2012 6 Pages PDF
Abstract
► We investigated effect of ultraviolet light exposure on p-type a-SiO:H films. ► Change in Urbach energy is lower for films with higher oxygen content. ► Hydrogen diffusion is lower for films with higher oxygen content. ► In higher oxides more OB bonds are converted to SiB bonds due to the UV light. ► Overall degradation of the films are lower for films with higher oxygen content.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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