| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355633 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Hydrogen interaction with defects and oxygen is observed for the processed SOI-like structures. ⺠Vacancy clusters and SiO2âx clusters are a dominating type of defects in the processed oxygen-implanted silicon. ⺠Hydrogen-plasma treatment can be used for detection of defects and of depth profile of oxygen in the SOI-like systems.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A. Misiuk, J. Bak-Misiuk, A. Barcz, P. Romanowski, I. Tyschenko, A. Ulyashin, M. Prujszczyk,