| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355637 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠Increase of magnetron discharge power results in densification of a-SiC:H thin films. ⺠The denser a-SiC:H material the better resistance to oxidation by oxygen. ⺠Oxidation of soft a-SiC:H films can result in increase of electric conductivity. ⺠Formation of graphitic clusters was found in a-SiC:H after annealing in oxygen.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A.V. Vasin, A.V. Rusavsky, A.N. Nazarov, V.S. Lysenko, P.M. Lytvyn, V.V. Strelchuk, K.I. Kholostov, V.P. Bondarenko, S.P. Starik,