Article ID Journal Published Year Pages File Type
5355663 Applied Surface Science 2011 7 Pages PDF
Abstract
► Ti-doped chromium oxynitride and Cr-doped titanium oxynitride films at Cr and Ti targets powers. ► Such co-sputtering studies using helium as inert gas is rare in literature. ► This article deals with a systematic study on structural, optical and hydrophobic properties of films. ► The chromium oxynitride films changes from hydrophilic to hydrophobic. ► The surface energy is sensitive to the contact angle and optical properties like n, Eg, %T are tailored.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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