Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5355674 | Applied Surface Science | 2011 | 4 Pages |
Abstract
⺠The VO2 thin film was deposited by a novel sputtering oxidation coupling method. ⺠The relationship between oxidation time and temperature 1/T is in agreement with Wagner's model. ⺠The oxidation time as a function temperature 1/T presents a linear relationship among 703 K-783 K.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Xiaofeng Xu, Xinfeng He, Gang Wang, Xiaolong Yuan, Xingxing Liu, Haiyan Huang, Sheng Yao, Huaizhong Xing, Xiaoshuang Chen, Junhao Chu,