| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355685 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠We evaluated the nanomechanical damage of annealed Si/SiGe strained-layer superlattices. ⺠The measured values of hardness and elastic moduli of the SLSs films were increased respectively. ⺠Slight oscillations and discontinuous phenomena in each hardness curve may have been due to the relaxed Si/SiGe structure.
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Physical and Theoretical Chemistry
Authors
Ming-Jhang Wu, Hua-Chiang Wen, Shyh-Chi Wu, Ping-Feng Yang, Yi-Shao Lai, Wen-Kuang Hsu, Wen-Fa Wu, Chang-Pin Chou,