| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355707 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠Raman spectroscopy analysis showed a strong dependence of the microstructure on the carbon content in the Ti-C-N films grown by RCBPLD. ⺠Thin films with a carbon content less than approximately 14 at% form a multiphase solid solution of TiN-TiCN. ⺠Increasing carbon content in the films promotes the formation of a nanocomposite of TiCN and TiC nanocrystals in an amorphous carbon matrix. ⺠The Raman features of the Ti-C-N films are very sensitive to carbon content suggesting that the observed Raman shifts could be used to estimate the carbon content in the films.
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Authors
L. Escobar-Alarcon, V. Medina, Enrique Camps, S. Romero, M. Fernandez, D. Solis-Casados,