Article ID Journal Published Year Pages File Type
5355712 Applied Surface Science 2011 5 Pages PDF
Abstract
► Zr doped ZnO films were deposited by spray pyrolysis. ► Average transmittance of 5 at.% Zr doped ZnO film is ∼92% in the visible region. ► The crystalline quality was deteriorated with the increase of Zr doping. ► 3 at.% Zr doped ZnO film possesses lowest resistivity of 2 × 10−3 Ω cm. ► RMS and grain size decrease with the increase of Zr doping.
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Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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Investigation on the effect of Zr doping in ZnO thin films by spray pyrolysis
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