Article ID Journal Published Year Pages File Type
5355719 Applied Surface Science 2011 5 Pages PDF
Abstract
► CrNxOy thin films were deposited by DC reactive magnetron sputtering. ► The thin films structural and electrical properties were investigated. ► Three different types of films were found depending on deposition parameters. ► The electrical resistivity depends strongly on thin film chemical composition.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Preparation and characterization of CrNxOy thin films: The effect of composition and structural features on the electrical behavior
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