Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5355719 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠CrNxOy thin films were deposited by DC reactive magnetron sputtering. ⺠The thin films structural and electrical properties were investigated. ⺠Three different types of films were found depending on deposition parameters. ⺠The electrical resistivity depends strongly on thin film chemical composition.
Related Topics
Physical Sciences and Engineering
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Physical and Theoretical Chemistry
Authors
R. Arvinte, J. Borges, R.E. Sousa, D. Munteanu, N.P. Barradas, E. Alves, F. Vaz, L. Marques,