| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355733 | Applied Surface Science | 2011 | 6 Pages |
Abstract
⺠We studied the electrical properties and microstructure of annealed ITO thin films. ⺠The ITO thin films were deposited by sputtering and annealed after deposition. ⺠The ITO thin films with high packing density had low-resistivity after annealing. ⺠The low-resistive ITO thin film came from high Hall mobility. âºThe carrier electrons of the films with high packing density can conduct well.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Kazuhiro Kato, Hideo Omoto, Takao Tomioka, Atsushi Takamatsu,