Article ID Journal Published Year Pages File Type
5355790 Applied Surface Science 2016 8 Pages PDF
Abstract

- A technology for GaSb surface cleaning is proposed.
- The technology combines ion sputtering, chemical etching, annealing for oxide removal.
- The ARXPS studies on GaSb surfaces are presented in a detailed manner.
- The surface stoichiometry is restored after recommended technology for contacting.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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