| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355830 | Applied Surface Science | 2016 | 6 Pages |
Abstract
- A synchrotron-based XPS method to analyze ultra-thin silane films is presented.
- Specification and quantification of organic next to inorganic silicon is demonstrated.
- Non-destructive chemical depth profiles of the silane monolayers were obtained.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Paul M. Dietrich, Stephan Glamsch, Christopher Ehlert, Andreas Lippitz, Nora Kulak, Wolfgang E.S. Unger,