Article ID Journal Published Year Pages File Type
5355873 Applied Surface Science 2012 8 Pages PDF
Abstract
► Various ZnO films with preferred ZnO(0 0 2) orientation were deposited at room temperature. ► The influence of different deposition conditions on the crystalline quality and microstructure of ZnO film were investigated. ► The ZnO film based piezoelectric micro cantilever was fabricated and its dynamic performance was measured. ► The d31 of ZnO film deposited under best sputtering condition is −3.21 pC/N.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers
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