| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355881 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠Plasma density increases in magnetic bottle configuration due to magnetized electrons drifting in crossed E Ã B fields, promoting electronneutral collision and as a result, the ion current density increases. ⺠Plasma immersion ion implantation in crossed E Ã B fields provides significant changes in surface properties of the samples. ⺠The plasma immersion ion implantation process with magnetic field has increased the dose and the depth of implantation by a factor of 1.5 in the case of sample implanted at high energy.
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Physical and Theoretical Chemistry
Authors
E.J.D.M. Pillaca, M. Ueda, K.G. Kostov, H. Reuther,