Article ID Journal Published Year Pages File Type
5355883 Applied Surface Science 2012 5 Pages PDF
Abstract
► Si (0 0 1) surface was sputtered with low energy oxygen beam. ► Secondary ion signals were detected. ► Temporal study of the resulting morphology shows two distinct growth regimes. ► The onset of ripple formation is obtained from dynamic scaling studies of the surface.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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