Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5355883 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Si (0 0 1) surface was sputtered with low energy oxygen beam. ⺠Secondary ion signals were detected. ⺠Temporal study of the resulting morphology shows two distinct growth regimes. ⺠The onset of ripple formation is obtained from dynamic scaling studies of the surface.
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Authors
Prabhjeet Kaur Dhillon, Subhendu Sarkar, Alexis Franquet, Alain Moussa, Wilfried Vandervorst,