Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5355894 | Applied Surface Science | 2012 | 8 Pages |
Abstract
⺠XRD peaks show a tendency of decreasing intensity with increasing Si content. ⺠Ti-Al-Si-Cu-N films present different microstructure with increasing Si content. ⺠Films with 6 at.% Si content obtain the highest hardness, elastic modulus and H3/E2. ⺠The wear rate decreases with an increase in hardness.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
J. Shi, C.M. Muders, A. Kumar, X. Jiang, Z.L. Pei, J. Gong, C. Sun,