Article ID Journal Published Year Pages File Type
5355894 Applied Surface Science 2012 8 Pages PDF
Abstract
► XRD peaks show a tendency of decreasing intensity with increasing Si content. ► Ti-Al-Si-Cu-N films present different microstructure with increasing Si content. ► Films with 6 at.% Si content obtain the highest hardness, elastic modulus and H3/E2. ► The wear rate decreases with an increase in hardness.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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