| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355899 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Au is known to favor the formation of CoSi2 by solid phase reaction of Co with Si. ⺠We investigated the formation of Co silicide islands in presence of Au-rich islands. ⺠Au-rich islands induce locally an extraction of Si atoms out of the substrate. ⺠Si atoms outdiffusion decreases the formation temperature of Co silicide islands.
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Authors
A. Fleurence, G. Agnus, T. Maroutian, B. Bartenlian, P. Beauvillain,