| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355904 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Novel SrHfON thin films were prepared by RF magnetron reactive sputtering. ⺠SrHfON films remain amorphous after 900 °C annealing. ⺠Refractive index increases while extinction coefficient decreases after annealing. ⺠The annealed SrHfON films have higher É1 and lower É2 than as-deposited SrHfON film.
Related Topics
Physical Sciences and Engineering
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Physical and Theoretical Chemistry
Authors
Li-ping Feng, Yin-quan Wang, Hao Tian, Zheng-tang Liu,