Article ID Journal Published Year Pages File Type
5355913 Applied Surface Science 2012 6 Pages PDF
Abstract
► Both the shape and half included angle of the indenter tip affect the friction coefficient, as well as normally scratched depth. ► The hardness has an influence on the creeping event of MCT wafers. ► Size effect is observed for the nanohardness during nanoindentation, which is presented using indentation curvature.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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