Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5355961 | Applied Surface Science | 2012 | 7 Pages |
Abstract
⺠Surface chemical-state analysis of gold-tin micro-patterns obtained after partial delamination of photo-resist during tin deposition. ⺠Heterogeneity of gold-tin surface chemistry (metal, oxide and alloyed, eutectic phase) over 10 μm. ⺠Practical use of high-resolution core level XPS spectromicroscopy (1 μm lateral resolution).
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Authors
O. Renault, A. Garnier, J. Morin, N. Gambacorti, F. Bertin,