| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355962 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Zirconia ultrathin film from the sol-gel solution is fabricated. ⺠Out-gassing behavior of the sol-gel-derived thin film is evaluated. ⺠The dielectric constant is dependent on the retention effect of preparation solvents.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Hsin-Chiang You, Chun-Ming Chang, Tzeng-Feng Liu, Chih-Chia Cheng, Feng-Chih Chang, Fu-Hsiang Ko,