| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5355992 | Applied Surface Science | 2011 | 4 Pages |
Abstract
⺠Low-temperature deposited un-doped ZnO films are successful prepared on PET substrates by using CAPD system. ⺠The effect of film thickness on the microstructure, optical and electrical properties of low-temperature deposited un-doped ZnO films by CAPD were investigated and discussed. ⺠This report may give significant information about how to deposit high quality ZnO thin films with desired optical and/or electrical properties at a low temperature using CAPD on the applications to be a newer alternatives to ITO in the display industries.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Ru-Yuan Yang, Min-Hang Weng, Cheng-Tang Pan, Chin-Min Hsiung, Chun-Chih Huang,