| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356002 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠RN is N2-to-Ar flow ratios, which effect on the structure and properties of films. ⺠Amorphous and FCC structures can be achieved at low RN and high RN, respectively. ⺠Solid solution strengthening and lattice strain enhanced the hardness of films. ⺠The nitride film deposited at RN = 0.5 has a friction coefficient of 0.12. ⺠Adhesive wear is the dominant wear mechanism in the films.
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Authors
B. Ren, Z.X. Liu, L. Shi, B. Cai, M.X. Wang,