Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5356007 | Applied Surface Science | 2011 | 6 Pages |
Abstract
⺠The FTO thin films were deposited on the soda-lime glass substrates by the sputtering method. An oxide buffer layer of SiO2 composition was deposited on glass substrate surface to enhance adhesion between the FTO film and substrate. ⺠The fluorine-doped tin oxide (FTO) thin films deposited on a soda-lime glass substrate was annealed by a defocus ultraviolet (UV) laser irradiation at ambient temperature. ⺠After laser irradiations using the various laser processing parameters, the post-annealed FTO films had different mechanical and optoelectric properties. ⺠The microhardness and reduced modulus of the annealed films were evaluated by a nanoindentation instrument. ⺠In addition, the transmittance spectra and sheet resistance of the annealed films were analyzed by a spectrophotometer and a four point probe instrument, respectively.
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Authors
Shih-Feng Tseng, Wen-Tse Hsiao, Donyau Chiang, Kuo-Cheng Huang, Chang-Pin Chou,