| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356013 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠We investigate the characterization of Ti doped diamond-like-carbon (DLC) as coating material on a silicon cantilever for ESPM. ⺠We deposited a layer of Ti-DLC thin film on the surface of Si cantilever by magnetron sputtering. ⺠The electric conductivity and the scanning image quality of the Ti-DLC-coated probes were the same as the commercial conductive probes, while the wear resistance and service life was significantly better.
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Authors
Xiaolei Shia, Liqiu Guo, Yang Bai, Lijie Qiao,