Article ID Journal Published Year Pages File Type
5356118 Applied Surface Science 2012 5 Pages PDF
Abstract
► Indium tin oxide thin film is directly patterned by a spatially modified Nd:YAG laser beam. ► Sharp-edged clean patterns with feature size as small as 4 μm are obtained. ► This parallel process provides much higher throughput than the tradition photoablation method.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd:YAG laser beam
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