| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356121 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Multi-hundred watt UV excimer lasers are used in industrial high-volume microprocessing. ⺠Excimer laser operational lifetime of two years under typical production conditions yields affordable high power UV laser processing. ⺠Laser lift-off processing of LEDs is facilitated by the large per-shot-area of excimer lasers.
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Authors
Ralph Delmdahl, Jean-Luc Tapié,