Article ID Journal Published Year Pages File Type
5356123 Applied Surface Science 2012 5 Pages PDF
Abstract
► We study laser-induced front side etching of fused silica with a XeF excimer laser. ► Different metal layers as absorber are used. ► The LIFE method allows nm-precision etching with etching depths up to 150 nm. ► The measurement results are compared to the results calculated by a thermal model.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers
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