Article ID Journal Published Year Pages File Type
5356129 Applied Surface Science 2012 4 Pages PDF
Abstract
► Single step laser assisted processing of Si-surfaces. ► Simultaneous etching of Si and deposition of carbon material. ► Carbon coated etch pits can be created. ► High processing rates and big aspect ratios of etch pits achievable.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Laser induced simultaneous etching of silicon and deposition of carbon materials
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