Article ID Journal Published Year Pages File Type
5356137 Applied Surface Science 2012 5 Pages PDF
Abstract
► Si1−xGex/Si pseudomorphic layers were synthesized by pulsed laser induced epitaxy. ► We performed strain and concentration measurements at the nanometer scale. ► Ge profiles are graded from the interface to the surface due segregation effects. ► The Ge profile is largely influenced by the temporal characteristics of the laser. ► A double peak laser pulse induces a two-stage solidification process.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
, , , , , , , , , , ,