| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356150 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠We have reached a sheet resistance lower than 500 Ω/sq for a junction depth of 29 nm and an abruptness of 3 nm/dec. ⺠Electrical measurements on diodes have revealed a significant leakage current of around 10â5 A/cm2, revealing the presence of defects inside the junction. ⺠Light Beam Induced Current (LBIC) characterization has shown that the defects are localized at the edge of the laser beam.
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Physical and Theoretical Chemistry
Authors
Yannick Larmande, Vanessa Vervisch, Philippe Delaporte, Thierry Sarnet, Marc Sentis, Hasnaa Etienne, Frank Torregrosa,