Article ID Journal Published Year Pages File Type
5356151 Applied Surface Science 2012 4 Pages PDF
Abstract
► Thickness profiles of BaxSr1−xTiO3 thin films were measured. ► Comparison between pulsed laser (PLD) and pulsed electron beam deposition (PED). ► The film thicknesses profile of PED has a slightly broader shape than that of PLD. ► The film stoichiometry is preserved at all angles.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Angular distribution of species in pulsed energy beam deposition of oxide films
Authors
, , ,