Article ID Journal Published Year Pages File Type
5356159 Applied Surface Science 2012 4 Pages PDF
Abstract
► Large-scale microstructures were formed on the surface of silicon with dimensions of 1 mm × 1 mm by femtosecond laser line-by-line scanning irradiation, in air and liquid assisted. ► Scanning electron microscopy investigations exhibited homogeneous surface microstructures, such as, ripples with sub-wavelengths dimensions, Si pillars and directional arranged bacilliform structures. ► The dependence of the surface morphology on laser energy and scanning speed was analyzed.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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