| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356166 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠A enthalpy-based model for pulsed excimer laser annealing was developed. ⺠The model predicts similar temperature and phase evolution than the phase-field model. ⺠Undercooling is found to be negligible in a TCAD model. ⺠The melt depth found in experiment is reproduced by simulation.
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Authors
M. Hackenberg, P. Pichler, K. Huet, R. Negru, J. Venturini, A. Pakfar, C. Tavernier, A. La Magna,