| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356169 | Applied Surface Science | 2012 | 7 Pages |
Abstract
⺠The effect of hydrogen in CW laser crystallization of hydrogenated amorphous silicon thin films has been investigated. ⺠Large hydrogen content results in decohesion of the films due to hydrogen effusion. ⺠Very low hydrogen content or hydrogen free amorphous silicon film are suitable for crystallization induced by CW laser. ⺠Grains of size between 20 and 100 μm in width and about 200 μm in long in scanning direction are obtained with these latter films.
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Authors
Z. Said-Bacar, P. Prathap, C. Cayron, F. Mermet, Y. Leroy, F. Antoni, A. Slaoui, E. Fogarassy,