| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5356171 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠Arrays of hollow-core sub-micrometric structures are fabricated. ⺠Laser interference lithography is used for the pattering of the resist sacrificial layer. ⺠The removal of the sacrificial layer gives rise to metallic channels with a maximum crosssectional area of 0.1 μm2. ⺠These structures can be used in nanofluidics.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Noemà Pérez, Txaber Tavera, Ainara RodrÃguez, Miguel Ellman, Isabel Ayerdi, Santiago M. Olaizola,